(1) Suitable for laser trimming applications of thin-film resistors and platinum resistors (PT100).
(2) Equipped with a high-quality solid-state ultraviolet laser trimmer (SP), featuring minimal thermal effect and high stability.
(3) Constant-temperature chuck and temperature-tracking trimming process, especially suitable for RTD resistor laser trimming.
(4) Integrated laser rangefinder for automatic laser focal adjustment.
(5) High-precision linear motor XY platform and direct-drive (DD) rotary stage.
(6) Built-in coaxial achromatic imaging system with image recognition and positioning functionality.
(7) Next-generation self-developed measurement system offering exceptional trimming accuracy and speed.
(8) Equipped with GPIB and Ethernet interfaces for external instrument connection, enabling laser trimming control via external devices.
(9) Integrated automatic ceramic substrate loading and unloading system.
| Application Video
| Main Technical Specifications
No. | Item | Specifications |
1 | Laser System | Laser Wavelength | 355 nm |
2 | Average Laser Power | 1W |
3 | Beam Quality | M⊃2; < 1.2 |
4 | Pulse Width | < 10 ns |
5 | Typical Spot Size | 10 µm |
6 | Focusing Method | Auto Focus |
7 | Laser Beam Positioning System | Laser Scanning Range | 50 mm × 50 mm |
8 | Repeat Positioning Accuracy | ±2.5 µm |
9 | Beam Movement Resolution | 0.75 µm |
10 | Vision System | Vision Type | Coaxial Achromatic Telecentric Imaging |
11 | Field of View | Dual Field: Approx. 1 mm × 1 mm Approx. 3 mm × 3 mm |
12 | Illumination Method | Coaxial Laser Illumination |
13 | Image Recognition Accuracy | < 10 µm |
14 | Measurement System | Resistance Measurement Method | Four-wire Measurement |
15 | Constant Current Source | 0.01 mA – 100 mA (programmable) |
16 | Resistance Measurement Accuracy | ±0.02% |
17 | Measurement Range | 0.1 Ω – 50 MΩ |
18 | Measurement Speed | 4 µs / sample |
19 | Matrix Channels | 64 channels (expandable) |
20 | XY Motion Platform | Drive System | Linear Motor with Optical Encoder |
21 | Travel Range | 300 mm × 200 mm |
22 | Repeatability Accuracy | ±0.0015 mm |
23 | Positioning Accuracy | ±0.003 mm |
24 | Motion Speed | 900 mm/s |
25 | Z-Axis (Probe) | Drive System | Linear Motor with Optical Encoder |
26 | Travel Range | 100 mm |
27 | Repeatability Accuracy | ±0.0015 mm |
28 | Positioning Accuracy | ±0.003 mm |
29 | Auto Loading System | Compatible Substrate Sizes | 2×2 inch / 4×4 inch ceramic substrates |
30 | Computer System | Host Computer | Industrial PC |
31 | Display | 21 inches |
32 | Operating System | Windows 10 |
| Equipment Configuration List
No. | Item | Specification | Brand |
1 | Laser Source | 355-1W | SP, USA |
2 | Beam Expander & Shaper | 10X | SIGMA, Japan |
3 | F-theta Lens | Customized | RONA-SMITH, Singapore |
4 | Galvanometer Scanner | Ø10 mm beam aperture | SCANLAB, Germany |
5 | Coaxial Vision System | Customized | ARGUS |
6 | XY Linear Motion Platform | Direct-drive Motor | ARGUS |
7 | Z-axis Lifting Mechanism | 100 mm Travel | ARGUS |
8 | CCD Camera | MVC1000MF | MICROVIEW |
9 | Image Recognition Software | EVISION | EURESYS, Belgium |
10 | Measurement System | Customized | ARGUS |
11 | External Measurement Instrument | DM6500 | KEITHLEY, USA |
12 | Dedicated Software System | Version 3.0 | ARGUS |
13 | Industrial PC | KL610-22-00 | ADLINK, Taiwan |
14 | Auto Loading System | Customized | ARGUS |
15 | Work Table Surface | Granite for Micromachining | ARGUS |
16 | Dust Purification System | DX1000 | KOOPER |
| Application fields
