Technical Parameters
1．Laser System
l Laser Wavelength：1064nm
l Laser Average Power：6W（TEM00）
l Classical Spot Size： 35-50µm
l Focusing Method： Controlled by PC program
2．Laser Beam Locating System
l Laser beam Motion Range：60mm X 60mm
l Motion Resolution：5µm
l Repeated Positioning Precision：1µm
l Max. Scanning Speed：5000mm/s
3．Graphic Monitor System
l Monitor Mode：Laser Coaxial Monitor
l Proprietary technology: achromatic technology, wide laser, coincidence imaging
l Monitoring field：4-6mm（diagonal）
l Lighting source: LED lighting
4．Measurement System
l Resistor measure method：Current measurement method
l Measurement Range： 1Ω-10MΩ（16bit Resolution）
l Measurement accuracy.
0.1Ω< Rx < 100Ω ±0.05% + 0.5% / Rx
100Ω< Rx < 100KΩ ±0.05%
100KΩ< Rx < 100MΩ ±0.05% + 0.05% * Rx
l Measurement Speed：25µs
l Resolution of DC voltage：0.16µV（Full Scale of 10mV）
l Probe Card：42 lines, arbitrarily defined
l Motion of Probe Card：Computer Program Control
5．Computer & Software System
l Control Computer Dual Processor，19 Inch LCD
l Operation System：Windows XP
6．Step Repeated Motion System
l Motion Method：Precision screw and double linear guide
l Motion Range：300mm*300mm
l Max Ceramic Plane Size：150mm*150mm
l Motion Resolution：1µm
l Repeated Positioning Precision：±5µm
l Position Precision： ±50µm
l Max Speed：120mm/s（carrying idler）
7．Other technical indicators
l External control: standard 4-way program-controlled switch, expandable
l Cooling system：Air-cooling
l Supply voltage：220V AC Pressure：<0.4MPa Total power consumption：2500W
