Laser Drilling And Metallization Process of Aluminum Nitride Ceramics under Controlled Atmosphere This study developed a hybrid manufacturing method integrating nanosecond laser direct drilling and electroless copper plating for high-hardness and high-brittleness aluminum nitride (AlN) ceramics. The effects of three atmospheres—air, water, and argon—on microhole quality were compared. The results show that microholes processed in an argon (Ar) atmosphere exhibit the optimal geometry, with a metallic aluminum content as high as 97.47% on the hole wall, which effectively induces a dense and uniform electroless copper plating layer. Ultimately, high-quality metallized microholes with a resistance as low as 7.35 mΩ were achieved, providing a reliable interconnection solution for high-density electronic packaging and heat dissipation substrates.